Gas Name Chemical Formula Range Sensor Part Number
Ammonia NH3 0-100 ppm MIDAS-E-NH3
Arsine AsH3 0-200 ppb MIDAS-E-ASH
Boron Trichloride BCl3 0-8 ppm MIDAS-E-HCL
Boron Trifluoride BF3 0-8 ppm MIDAS-E-HFX
Boron Trifluoride (Low Level) BF3 0-2 ppm MIDAS-E-HFL
Bromine Br2 0-0.4 ppm MIDAS-E-BR2
Butane n-C4H10 0~100 %LEL MIDAS-E-LEB
Carbon Dioxide CO2 0-2.0% MIDAS-E-CO2
Carbon Monoxide CO 0-100 ppm MIDAS-E-COX
Carbon Monoxide (Low H2 interference) CO 0-100 ppm MIDAS-E-COH
Chlorine Cl2 0-2 ppm MIDAS-E-HAL
Chlorine Dioxide ClO2 0-0.4 ppm MIDAS-E-BR2
Diborane B2H6 0-400 ppb MIDAS-E-B2H
Dichlorosilane H2Cl2Si 0-8 ppm MIDAS-E-HCL
Difluoromethane** CH2F2 0-240 ppm MIDAS-E-XCF
Disilane Si2H6 0-20 ppm MIDAS-E-SHX
Ethylene C2H4 0~100 %LEL MIDAS-E-LEL
Fluorine F2 0-4 ppm MIDAS-E-HAL
Germane GeH4 0-800 ppb MIDAS-E-ASH
Hexafluorobutadiene** C4F6 0-40 ppm MIDAS-E-CFX
Hydrogen (%LEL) H2 0~100 %LEL MIDAS-E-LEL*
Hydrogen (ppm) H2 0-1000 ppm MIDAS-E-H2X
Hydrogen Bromide HBr 0-8 ppm MIDAS-E-HCL
Hydrogen Chloride HCl 0-8 ppm MIDAS-E-HCL
Hydrogen Cyanide HCN 0-20 ppm MIDAS-E-HCN
Hydrogen Fluoride HF 0-12 ppm MIDAS-E-HFX
Hydrogen Fluoride (Low Level) HFL 0-2 ppm MIDAS-E-HFL
Hydrogen Sulfide H2S 0-40 ppm MIDAS-E-H2S
Methane (%LEL) CH4 0~100 %LEL MIDAS-E-LEL*
Methyl Fluoride** CH3F 0-120 ppm MIDAS-E-XHF
Nitric Oxide NO 0-100 ppm MIDAS-E-NOX
Nitrogen Dioxide NO2 0-12 ppm MIDAS-E-NO2
Nitrogen Trifluoride** NF3 0-40 ppm MIDAS-E-HFX for 00P, XHF for NP1
Octane n-C8H18 0~100 %LEL MIDAS-E-LEO
Octofluorocyclopentene** C5F8 0-40 ppm MIDAS-E-XCF
Oxygen O2 0~25% v MIDAS-E-O2X
Ozone O3 0-0.7 ppm MIDAS-E-O3H
Ozone (Low Level) O3 0-0.4 ppm MIDAS-E-O3X
Phosphine PH3 0-1200 ppb MIDAS-E-PH3
Propane C3H8 0~100 %LEL MIDAS-E-LEX
Propylene C3H6 0~100 %LEL MIDAS-E-LEL
R134a C2H2F4 0-1000 ppm MIDAS-E-XCF
Silane SiH4 0-20 ppm MIDAS-E-SHX
Silane (Low Level) SiH4 0-2 ppm MIDAS-E-SHL
Sulfur Dioxide SO2 0-8 ppm MIDAS-E-SO2
Tetra Ethyl Ortho Silicate TEOS 0-40 ppm MIDAS-E-TEO
Tungsten Hexafluoride WF6 0-12 ppm MIDAS-E-HFX
Tungsten Hexafluoride (Low Level) WF6 0-2 ppm MIDAS-E-HFL
