节流阀
智能排气压力控制器
ATV3000智能排气压力控制器
ATV3000排气压力控制器用于控制真空室的压力。
它也被制造来控制广泛的压力范围。
由于控制器和阀门是一体制造的,因此可以通过不使用额外的控制器来降低成本。
功能和优势
■ATV3000智能排气节流阀采用微步进电机和直接齿轮传动,提高了阀门的分辨率。可以半永久使用。
■ATV3000智能排气节流阀采用高扭矩电机,因此真空线(如12英寸)可以安装在大尺寸的腔室。可以使用
■ATV3000智能排气节流阀阀体即使在加热到150˚C后也可以使用。(不包括密封型)
■ATV3000智能排气节流阀在FND中显示挡板位置,用户可以从外部查看阀门是否工作。
它的设计使其可以在不与设备分离的情况下进行检查。
■对于ATV3000智能排气节流阀,可根据客户需要在订购时设置法兰型式。(法兰型式:ISO-NW、ASA、CF、JIS、KF)
■ATV3000智能排气节流阀只能在外部提供直流电源(+24VDC)时使用。
Throttle Valve
Smart Exhaust Pressure Controller
ATV3000 Smart Exhaust Pressure Controller
The ATV3000 Exhaust Pressure Controller is used to control the pressure in the vacuum chamber.
It is also manufactured to control a wide range of pressure.
Since the controller and the valve are manufactured in one piece, it can have an effect of reducing the cost by not using an additional controller.
Features & Benefits
■ ATV3000 Smart Exhaust Throttle Valve uses Micro-Stepping Motor and Direct Gear Driver to improve the resolution of the valve. Can be used semi-permanently.
■ ATV3000 Smart Exhaust Throttle Valve uses High Torque Motor, so vacuum line (eg 12 inch) can be installed even in Large Size Chamber. can be used
■ ATV3000 Smart Exhaust Throttle Valve Body can be used even after heating up to 150˚C. (Excluding Sealing Type)
■ ATV3000 Smart Exhaust Throttle Valve displays the flapper's position in FND so that the user can check it from the outside to check whether the valve is operating or not.
It is designed so that it can be checked without being detached from the equipment.
■ For ATV3000 Smart Exhaust Throttle Valve, Flange Style can be set when ordering as desired by the customer. (Flange Style: ISO-NW, ASA, CF, JIS , KF)
■ ATV3000 Smart Exhaust Throttle Valve can be used only when DC Power (+24VDC) is supplied from the outside.
Product

Specifications
Speed (open to close)
|
1.5sec
|
Resolution
|
1/12000
|
Drive Method
|
Direct gear drive
|
Maximum Valve Body Operating Temperature
|
Standard 0-100
Optional : 0 - 150 (Note 1)
|
Valve Motor Ambient
Operating Temperature
|
-20 to +40
|
Differential Pressure
Across Valve
|
1 atm. (15psig) max.
|
External Leakage at Shaft seal
|
1x10-8sec/sec He
|
Materials Exposed to Process
|
Standard : 304 S.S., Viton (Note 2)
Optional :316 S.S., Viton (Note 2)
|
Visual Position Indicator
|
FND
|
Drive Output Torque
(with Model GPC3000 or MKS Type 651)
|
800 in-oz
|
Specifications
Speed (open to close)
|
1.5sec
|
Resolution
|
1/24000
|
Drive Method
|
Direct gear drive
|
Maximum Valve Body Operating Temperature
|
Standard 0-100
Optional : 0 - 150 (Note 1)
|
Valve Motor Ambient
Operating Temperature
|
-20 to +40
|
Differential Pressure
Across Valve
|
1 atm. (15psig) max.
|
External Leakage at Shaft seal
|
1x10-8sec/sec He
|
Materials Exposed to Process
|
Standard : 304 S.S., Viton (Note 2)
Optional :316 S.S., Viton (Note 2)
|
Compatible Controller
|
Model GPC3000
MKS Type 651, 1651
|
Drive Output Torque
(with Model GPC3000 or MKS Type 651)
|
800 in-oz
|