Convection Gauge
EG301 (Enhanced Convection Gauge)
EG301 Enhanced Convection Gague
Generally installed in a vacuum chamber, it is a gauge that reads the actual pressure in the vacuum chamber, and requires +24 VDC (15 VDC possible) power.
EG301 Enhanced Convection Gauge with 3~10 VDC signal output is used in semiconductor process and vacuum equipment.
Features & Benefits
■ A wide range of pressure measurements is possible (2.0 X 10-4 to 760 Torr).
■ High accuracy and increased floor space efficiency.
■ Analog Output is provided so that it can be directly connected to PLC and other devices for display.
■ Can be read from a distance due to adoption of 7-segment LED.
■ PC can be controlled using RS-485.
■ Two Set-Points are provided for use in external devices and processes.
■ It can be repaired at a low cost (replacement of the sensor wire).
■ Can be used alone without the need for a controller.
Products
Dimensions
Specifications
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Physical
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Input Power
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+24 VDC (15 VDC 가능)
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Output Power
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+3 VDC to 10 VDC
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Operating Temperature
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0 ~ 50°c
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Pressure Range
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2.0 X 10-4 ~ 760 Torr
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Display Window
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7-segment LED
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Display Unit
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Torr
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Mounting Position
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Horizontal
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Filament
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Platinum 99.999 %
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Flanges
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NW16 ISO-KF , NW25 ISO-KF, 1/4 VCR Female, CF Flange
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Interface
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Analog Output, RS-485 , 2 Set-Point
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