AFC500/AFC600 ，韩国ATOVAC质量流量控制器
AFC500/AFC600 ，韩国ATOVAC质量流量控制器
AFC500/AFC600 ，韩国ATOVAC质量流量控制器
MFC
AFC500/AFC600 MASS FLOW CONTROLLER
AFC500/AFC600 MASS FLOW CONTROLLER
AFC500/AFC600 Mass Flow Controller the mass flow rate of a gas and controls the flow rate according to a given set point. The control range is from 2 to 100% of Full Scale with an accuracy of +/- 1% of Full Scale.
AFC 500 Mass Flow Controller is available in ranges is from 10 to 50,000 sccm (N2 equivalent)
AFC 500 Mass Flow Controller can interface to complementary ATOVAC equipment(Type GMC1200, GMC220, GMC300D , GMC50) to display the regarding and to provide the power, and set point commands
Features & Benefits
■ Full Scale flow range from 10 sccm to 50 slm for precise and repeatable flow measurement and control
■ Percent of full scale accuracy for analog configurations
■ Percent of reading accuracy with digital configurations.
■ Fast warm-up time minimizes expensive production downtime
■ CE Mark compliant
Product
Dimensions
Specifications
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Full S cale Ranges (N2 equivalent)
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10 SCCM ~ 50 SLM |
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Maximum lnlet P ressure
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150 psig
|
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Normal Operating Pressure Differential
(with atmospheric pressure at the. MFCoutlet)
10 to 5000 sccm
10000 to 20000 sccm
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10 to 40 psid
15 to 40 psid
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Control Range
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2% to 100% of F.S
|
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Accuracy (analog)
(including non-linearity, hysteresis,
and non-repeata bility referenced to 760mmhg and 0°c)
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±1.0% of F.S
|
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Repeatability
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±0.2% of F.S
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Resolution
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1.0% of F.S
|
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Temperature Coefficients
Zero
Span
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<0.05 % of F.S./°C
<0.05 % of F.S.
|
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Warm-up Time (to within 0.2% of F.S. of steady state performance)
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< 2 min
|
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Controller Settling Time
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< 2 sec
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Pressure Coefficient
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<0.02 % of Rdg./psi
|
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Normal Operating Temperature Range
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0°C to 50°C
|
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Input Voltage Required
Max. current at start-up (first 2 sec)
Typical current at seady state
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±15 VDC(±5%) @ 200 mA
+15 ~ 24 VDC(±5%) @ 300 mA (Option)
|
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Set Point Command Signal
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0 to 5 VDC (Option 4~20 mA)
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Output Signal
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0 to 5 VDC (Option 4~20 mA)
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Connector Types Analog
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9-pin "D" Type
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| REMOTE MODE |
RS485, RS232 |
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Wetted Materials
Stan dard Optional
(seals and valve seat)
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316L S.S. , Vition , Kalrez(AFC600)
|
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Leak Integrity External (scc/sec He)
Through closed valve
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<1 x 10(-9)
<1.0% of F.S. at 40 psig inlet to atmosphere(Toassure no flow-through, a separate positives shut-off valve is recommended.)
|
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Fittings (compatible with)
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Swagelok 4 VCR, 1/4" Swagelok
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