韩国ATOVAC高质量流量控制器，Afc770
韩国ATOVAC高质量流量控制器，Afc770
韩国ATOVAC高质量流量控制器，Afc770
MFC
AFC770 HIGH MASS FLOW CONTROLLER
AFC700 HIGH MASS FLOW CONTROLLER (Viton , Kalrez Seal)
MFC is an abbreviation of Mass Flow Controller, and it is a device that allows the gas from the gas bottle to flow at a constant flow rate desired by the user. Although the unit varies slightly from manufacturer to manufacturer, the standard Cubic Centimeter per Minutes (SCCM) is commonly used.
Features & Benefits
■ AFC770 (HIGH Mass Flow Controller) is generally designed to be used for semiconductor fixing including industrial applications.
■ AFC770 (HIGH Mass Flow Controller) has a full scale range of 51 SLM to 500 SLM.
■ AFC770 (HIGH Mass Flow Controller) has an error corresponding to 1% of Full Scale.
■ AFC770 (HIGH Mass Flow Controller) is designed as a product that requires little warm-up time.
■ AFC770 (HIGH Mass Flow Controller) uses 9Pin D-sub Connector by default.
■ AFC770 (HIGH Mass Flow Controller) can be used with MFC Power Supply & Display Unit such as GMC1200.
Product
Dimensions
Specifications
|
Full S cale Ranges (N2 equivalent)
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51 SLM~ 500 SLM |
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Maximum lnlet P ressure
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150 psig
|
|
Normal Operating Pressure Differential
(with atmospheric pressure at the. MFCoutlet)
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45 to 75 psid
|
|
Control Range
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2% to 100% of F.S
|
|
Accuracy (analog)
(including non-linearity, hysteresis,
and non-repeata bility referenced to 760mmhg and 0°c)
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±1.0% of F.S
|
|
Repeatability
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±0.2% of F.S
|
|
Resolution
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1.0% of F.S
|
|
Temperature Coefficients
Zero
Span
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<0.05 % of F.S./°C
<0.05 % of F.S.
|
|
Warm-up Time (to within 0.2% of F.S. of steady state performance)
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< 2 min
|
|
Controller Settling Time
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< 2 sec
|
|
Pressure Coefficient
|
<0.02 % of Rdg./psi
|
|
Normal Operating Temperature Range
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0°C to 50°C
|
|
Input Voltage Required
Max. current at start-up (first 2 sec)
Typical current at seady state
|
±15 VDC(±5%) @ 200 mA
+13~30VDC(±5%) @ 300 mA (Option)
|
|
Set Point Command Signal
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0 to 5 VDC (Option 4~20 mA)
|
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Output Signal
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0 to 5 VDC (Option 4~20 mA)
|
|
Connector Types Analog
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9-pin "D" Type
|
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REMOTE MODE
|
RS485 , RS232
|
|
Wetted Materials
Stan dard Optional
(seals and valve seat)
|
316L S.S. , Vition , Kalrez
|
|
Leak Integrity External (scc/sec He)
Through closed valve
|
<1 x 10(-9)
<1.0% of F.S. at 40 psig inlet to atmosphere(Toassure no flow-through, a separate positives shut-off valve is recommended.)
|
|
Fittings (compatible with)
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Swagelok 2 VCR,
1/2" Swagelok
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