韩国ATOVAC节流阀，Throttle valve，APC200 节流阀控制器
韩国ATOVAC节流阀，Throttle valve，APC200 节流阀控制器
韩国ATOVAC节流阀，Throttle valve，APC200 节流阀控制器
Throttle valve
[APC200] APC200 [Throttle Valve Controller]
APC200 Throttle ValveController
APC200 Pressure & Flow Controller is a Digital PID Pressure Controller for throttle
Valve, It can supply +/- 15VDC to power and provide a readout for an attached
Capacitance Manometer & four mass flow controllers.
Features & Benefit
■ Maximum 4 channel MFC control out(2,4 channel available)
■ RS-232C PC Interface , TTL flow On/Off Command available
Product
Dimensions
Specifications
|
Valves Operated
|
ATV1000 Exhaust Throttle Valves, MKS Type
653 and Others
|
|
Pressure Input Signal
|
Standard : 0-10 VDC
|
| Input Power Required |
90-132 or 180-264 VAC, 50/60 Hz |
|
Set Point
Programmable
External Analog
|
5 total, programmable in any combin for pressure or position
(adjustable from the front panel or RS232/RS485 selectable from the front panel, TTL, or RS232/RS485)
0-10 VDC
|
|
Controller Repeatability
|
±0.1% of F.S
|
|
Ambient Operating
Temperature
|
150C - 450C
|
|
Output Power
|
±15 VDC ±5% @ 1.5 Amp
|
|
Analog Output Signal
|
0-10 VDC for 0-100% valve position and 0-10 VDC for 1-100%, F.S pressure
|
|
Size
|
1/2-rack packing : 88mm H x 241mm W x 225 D
|
|
Display
|
240x(RGB) X 320 pixels Transmissive LCD
(pressure, position and external set-point readout)
|
|
Display Units
Soft Start
|
Torr, mTorr, mbar, Pascal, cmH20, inH20, mbar, kpa Standard
|
|
PID Control
|
Standard
|
|
Remote Zero
|
Standard
|
|
Interface
|
Front panel, Analog, TTL and RS232 , RS485
|
|
Relay Output
|
2, process limits : 24 Volts AC/DC 0.5Amp resistive
|
|
Remote Control Override
(Open, Close, Hold)
|
Standard
|
|
Position Control
Capability
|
Standard
|
|
Battery Backup
|
N/A
|
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GMC220 [Power Supply & Readout Unit]
GMC300D [P/S & Flow Controller]
AMC60 [P/S & Flow controller]
GPD-5 [P/S & Pressure
Vacuum Gauge
All : 2
GVC2200 Vacuum Gauge Controller
CG2000 [Vacuum Gauge
MFC
All : 2
AFC770 HIGH MASS FLOW CONTROLLER
AFC500/AFC600 MASS FLOW CONTROLLER
Convection Gauge
All : 2
EG301 (Enhanced Convection Gauge)
CG202 [Convection
Ion Gauge
All : 1
ION Gauge [4336K]
Capacitance Manometer
All : 2
Secret
730 [Capacitance Manometers]
Secret
761 [Capacitance Manometers]Throttle Valve
All : 4
Smart Exhaust Pressure Controller
All Teflon(POCL3)
ATV1000 [Throttle Valve]
ATV1000-B [Throttle Valve Blind]
1
MFC Box Panel & Gas Flow System
All : 4
Gas Line System
AMCB (MFC Control Box Unit 2~6 Channel)
AMCB [MFC Control Box]
AMCB (MFC Control Box Unit 2 Channel)
1