韩国ATOVAC压力计，MPG2000，Pressure Gauge
韩国ATOVAC压力计，MPG2000，Pressure Gauge
韩国ATOVAC压力计，MPG2000，Pressure Gauge
欢迎光临阿托瓦克有限公司。
我公司成立于1997年10月，以开发半导体生产过程中的气体和真空控制系统，测量为主要组件。
我们正在大力发展智能元件，包括MFC、MFC控制器、对流计及控制器、离子计及控制器、电容压力表、节流阀控制器等。
我们ATOVAC将在未来和现在保持我们可靠和受人尊敬的公司的地位。请给我们更多的鼓励和建议。我们总是愿意听取客户的意见。
MPG1000 Mini Pressure Gague
MPG Series are part of the Atovac family of general purpose pressure gauge designed
to provide accurate reliable, and repeatable Pressure measurements in the range
from 1 Torr to 0.001 Torr.
Features & Benefits
■ Smaller, saving space
■ Signal Output of 1.0 to 5.0 VDC.
■ Pressure measurement range is 1 Torr to 0.001 Torr
■ Lower-cost
■ Linear Analog Output
Products
Dimensions
Specifications
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Physical
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Input Power
|
+24 VDC (15 VDC 가능)
|
|
Output Power
|
+1.000 VDC to 5.000 VDC
|
|
Operating Temperature
|
0 ~ 50°c
|
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Pressure Range
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2.0 X 10-3 ~ 1.000 Torr
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Mounting Position
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Vertical Mounting
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Flanges
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1/4 VCR male
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Interface
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Analog Output |
| Connection |
M8 male 4 pin Connector
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Warm Up - Time
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10 minutes
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Response Time
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<50 msec
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History
1997year
Founded GAT Co.LTD
1998year
Developed GMC100A Controller, GMC1000 Controller, Contracted about developed MFC associated with ITEP
1999year
Exported Contracted with France-Qualiflow OEM MFC controller Developed High Vacuum Ionization Gauge Controller
2000year
Developed Gas Flow Control Software
2001year
Developed MFC Controller(GMC200A), CM Controller(GPD-4), Pirani Gauge (CG201), Pirani Gauge Controller (CG2000)
2003year
Developed GMC7100 & supply contracted with LG PDP Line (A2), Developed MFC Controller (GMC300D)
2004year
Developed Vacuum Gauge Controller(GVC2200)
2005year
Developed MFC Controller (GMC1100),
Developed GVC2200 & Supply contracted with LG PDP Line(A3)
2006year
Developed MFC Controller GMC1200)
2007year
Developed GAS Totalizer(GT1000), Voltage Meter( VM1000)
2008year
Developed Throttle Valve(ATV1000), Valve Controller(GPC3000)
Change Company name to ATOVAC Co.LTD & Expanding
2009year
Acquired CE for Throttle Valve, Developed Capacitance Manometer Gauge, Throttle Valve(ATV2000), Mass Flow Controller(MFC)
2010year
Supplied Capacitance Manometer , APC Controller & Valve to Samsung
Developed APC Valve for PoCl3 Process, Acquired CE for APC Controller & MFC
2012year
Developed Enhanced Convection Gauge(EG301)
2013year
Acquired ISO9001
Developed Mems Pressure Gauge(MPG)
Developed High Temperature Gauge(EG400)
2014year
Acquired Explosion-proof certification for MPG
Office relocation(Yong In)
2015year
Introduced CNC lathes and MFC (machining centers) and built their own processing lines.
Established an affiliated research institute.
2016year
Renewal the EG301 & GPC3000
Developed MFC for IGS TYPE(AFC500-IGS)
[MPG2000] [MPG1000] Mini Pressure Gauge (방)
MPG2000 Mini Pressure Gague
MPG Series are part of the Atovac family of general purpose pressure gauge designed
to provide accurate reliable, and repeatable Pressure measurements in the range
from 1 Torr to 0.001 Torr.
Features & Benefits
■ Smaller, saving space
■ Signal Output of 1.0 to 5.0 VDC.
■ Pressure measurement range is 1 Torr to 0.001 Torr
■ Lower-cost
■ Linear Analog Output
Products
Dimensions
Specifications (방)
|
Physical
|
|
방구조
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Ex Na II T6 IP54
|
|
Input Power required
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+24 VDC (15VDC 가능) 100 mA
|
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Voltage Output current
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10 mA
|
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Overpressure Limit
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10 bar (150 psi)
|
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Accuracy
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+/- 1.0 %
|
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Resolution
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0.001 m torr
|
|
직선성
|
Linear Output 제공 ( 5.000 to 1.000 VDC , 1 mtorr 증가시 4mVolt 씩 증가)
|
|
사용 습도
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0 ~ 100 %
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사용 온도(온도에 따라 오차율)
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0 ~ 50°C (0-10 °C 이내 또는 40-50°C 이내 , 0.2 < % of Full Scale)
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케이스 재질
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SUS 304
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절연저
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35 MΩ / 500 Volt
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가스 접부 재질
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SUS 316L
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용접방법
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레이저 용접
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Leak Rate
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1 x 10-9 Torr 이 (He Leak detector 사용)
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