韩国DK-LOK，DKLOK，TKF过滤器，SS-A200-4VM
韩国DK-LOK，DKLOK，TKF过滤器，SS-A200-4VM
韩国DK-LOK，DKLOK，TKF过滤器，SS-A200-4VM
Features■ Wide range flow rate from 15 to 300SLPM■ Excellent compatibility with most high purity semiconductor process gases.■ 3 Nanometer particle filtering capability keeps up high flow efficiency with minimum pressure drop.■ 5Ra electro-polished surface prevents internal contaminations.■ Baked with hot nitrogen after DI water cleaning to meet semiconductor process standards.■ Class 100 manufacturing, cleaning and packaging environment.■ 100% helium leak tested.Ordering Information
| Size |
Connection |
| 4 |
1/4" |
VM |
MFS male type |
| 6 |
3/8" |
SW |
Lok type |
| 8 |
1/2" |
|
|
Specifications
| Removal Rating |
≥ 0.0025 ㎛ |
| Retention |
Greater than 99.9999999999% Removal of all particles down to 0.0025 um |
| Rated flow @ 10^9 |
15 SLPM |
| 60 SLPM |
| 120 SLPM |
| 200 SLPM |
| 300 SLPM |
| Materials |
Filter element |
316L Stainless steel |
| Elctropolished housing |
SM/DM 316L Stainless steel |
| Operationg conditions |
Maximum inlet pressure |
21 MPa (210kgf/cm2) at 20 °C |
| Maximum differential pressure |
15 MPa (153kgf/cm2) at 20 °C |
| Maximum operating temperature |
460 °C (Inert gas) |
| Helium leak rating |
1 x 10^-9 atm · cc / sec |
| Surface finish interior |
≤ Ra 5μin |
Dimensions
| Part No. |
A/mm |
B/mm |
C/mm |
D/mm |
E/mm |
F/mm |
H/mm |
| SS-A15-4VM |
15.5 |
53 |
15.5 |
27 |
30 |
27 |
84 |
| SS-A15-4SW |
10 |
53 |
10 |
27 |
30 |
27 |
73 |
| SS-A60-4VM |
15.5 |
53 |
15.5 |
27 |
30 |
27 |
84 |
| SS-A60-4SW |
10 |
53 |
10 |
27 |
30 |
27 |
73 |
| SS-A60-6(8)VM |
19 |
53 |
19 |
27 |
30 |
27 |
91 |
| SS-A120-4VM |
15.5 |
96 |
15.5 |
29 |
33 |
30 |
127 |
| SS-A120-4SW |
10 |
96 |
10 |
29 |
33 |
30 |
116 |
| SS-A120-6(8)VM |
19 |
96 |
19 |
29 |
33 |
30 |
134 |
| SS-A120-6(8)SW |
12 |
96 |
12 |
29 |
33 |
30 |
120 |
| SS-A200-4VM |
15.5 |
98 |
15.5 |
35 |
39 |
35 |
129 |
| SS-A200-4SW |
10 |
98 |
10 |
35 |
39 |
35 |
118 |
| SS-A200-6(8)VM |
19 |
98 |
19 |
35 |
39 |
35 |
136 |
| SS-A200-6(8)SW |
12 |
98 |
12 |
35 |
39 |
35 |
122 |
| SS-A300-4VM |
15.5 |
98 |
15.5 |
35 |
39 |
35 |
129 |
| SS-A300-4SW |
10 |
98 |
10 |
35 |
39 |
35 |
118 |
| SS-A300-6(8)VM |
19 |
98 |
19 |
35 |
39 |
35 |
136 |
| SS-A300-6(8)SW |
12 |
98 |
12 |
35 |
39 |
35 |
122
|