接头/阀门

韩国tk-fujikin过滤器,ST-A50-4VM
  • 韩国tk-fujikin过滤器,ST-A50-4VM

  • 韩国tk-fujikin过滤器,ST-A50-4VM

    Features■ PTFE element with superior corrosion resistance and excellent compatibility for most high purity semiconductor process gases.■ 3 Nanometer particle filtering capability keeps up high flow efficiency with minimum pressure drop.■ 5Ra electro-polished surface prevents internal contaminations.■ Baked with hot nitrogen after DI water cleaning to meet semiconductor process standards.■ Class 100 manufacturing, cleaning and packaging environment.■ 100% helium leak tested.Ordering Information

    Size Connection
    4 1/4" VM MFS male type
    6 3/8" SW Lok type
    8 1/2"    

    Specifications

    Removal Rating ≥ 0.0025 ㎛
    Retention Greater than 99.9999999% Removal of all particles down to 0.0025 ㎛
    Rated flow @ 109 50 SLPM
    100 SLPM
    150 SLPM
    Materials Filter element PTFE / PFA / PTFE
    Elctropolished housing SM/DM 316L Stainless steel
    Operationg conditions Maximum inlet pressure 0.98 MPa (10kgf/cm2) at 20 °C
    Maximum differential pressure 0.4 MPa (4.2kgf/cm2) at 20 °C
    Maximum operating temperature 120 °C (Inert gas)
    Helium leak rating 1 x 10-9 atm · cc / sec
    Surface finish interior ≤ Ra 5μin

    Dimensions

    PartNo. A/mm B/mm C/mm D/mm E/mm F/mm H/mm
    ST-A50-4VM 15.5 53 15.5 21.5 23.5 22 84
    ST-A50-4SW 10.4 52.2 10.4 21.5 23.5 22 73
    ST-A100-4VM 15.5 96 15.5 26.5 30 27 127
    ST-A100-4SW 10.4 95.2 10.4 26.5 30 27 116
    ST-A100-6(8)VM 19 96 19 26.5 30 27 134
    ST-A100-6(8)SW 12 96 12 26.5 30 27 120
    ST-A150-4VM 15.5 96 15.5 26.5 30 27 127
    ST-A150-4SW 10.4 95.2 10.4 26.5 30 27 116
    ST-A150-6(8)VM 19 96 19 26.5 30 27 134
    ST-A150-6(8)SW 12 96 12 26.5 30 27 120

    Performance Data

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    於万里 15371083762於万里 15371083762

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