韩国tk-fujikin过滤器,SS-H600-8VM-X489
Stainless Steel Filter (S-H)
■ Ultra-high purity in-line high flow gas filter
■ All 316L stainless steel constructions
■ High temperature and dynamic pressure applications
■ Compact size and variable end connections |
![uhp_filter_S-H Series Stainless Steel Filters.gif](http://www.tk-fujikin.com/tksct/files/attach/images/2581/758/002/fee116c36dd46aee37e07898b6b04db7.gif)
Features■ Wide range flow rate from 100 to 800 SLPM■ Excellent compatibility with most high purity semiconductor process gases.■ 3 Nanometer particle filtering capability keeps up high flow efficiency with minimum pressure drop.■ 5Ra electro-polished surface prevents internal contaminations.■ Baked with hot nitrogen after DI water cleaning to meet semiconductor process standards.■ Class 100 manufacturing, cleaning and packaging environment.■ 100% helium leak tested.Ordering Information
Size |
Connection |
4 |
1/4" |
VM |
MFS male type |
6 |
3/8" |
SW |
Lok type |
8 |
1/2" |
|
|
Specifications
Removal Rating |
≥ 0.0025 ㎛ |
Retention |
Greater than 99.9999999% Removal of all particles down to 0.0025 ㎛ |
Rated flow @ 109 |
100 SLPM (MAX 150SLPM) |
150 SLPM (MAX 200SLPM) |
600 SLPM (MAX 800SLPM) |
Materials |
Filter element |
316L Stainless steel |
Elctropolished housing |
SM/DM 316L Stainless steel |
Operationg conditions |
Maximum inlet pressure |
12 MPa (122kgf/cm²) at 20°C |
Maximum differential pressure |
10 MPa (101kgf/cm²) at 20°C |
Maximum operating temperature |
460 °C (Inert gas) |
Helium leak rating |
1 x 10-9 atm · cc / sec |
Surface finish interior |
≤ Ra 5μin |
Dimensions
PartNo. |
A/mm |
B/mm |
C/mm |
D/mm |
E/mm |
F/mm |
H/mm |
SS-H100-4VM |
15.5 |
53 |
15.5 |
32 |
35 |
32 |
84 |
SS-H100-4SW |
10.4 |
52.2 |
10.4 |
32 |
35 |
32 |
73 |
SS-H100-6(8)VM |
19 |
53 |
19 |
32 |
35 |
32 |
91 |
SS-H100-6(8)SW |
12 |
53 |
12 |
32 |
35 |
32 |
77 |
SS-H150-4VM |
15.5 |
53 |
15.5 |
32 |
35 |
32 |
84 |
SS-H150-4SW |
10.4 |
52.2 |
10.4 |
32 |
35 |
32 |
73 |
SS-H150-6(8)VM |
19 |
53 |
19 |
32 |
35 |
32 |
91 |
SS-H150-6(8)SW |
12 |
53 |
12 |
32 |
35 |
32 |
77 |
SS-H600-4VM |
15.5 |
96 |
15.5 |
32 |
35 |
32 |
127 |
SS-H600-4SW |
10.4 |
95.4 |
10.4 |
32 |
35 |
32 |
116 |
SS-H600-6(8)VM |
19 |
96 |
19 |
32 |
35 |
32 |
134 |
SS-H600-6(8)SW |
12 |
96 |
12 |
32 |
35 |
32 |
120 |
Performance Data