Stainless Steel Filter (S-H)

■ Ultra-high purity in-line high flow gas filter
■ All 316L stainless steel constructions
■ High temperature and dynamic pressure applications
■ Compact size and variable end connections

uhp_filter_S-H Series Stainless Steel Filters.gif
Features■ Wide range flow rate from 100 to 800 SLPM■ Excellent compatibility with most high purity semiconductor process gases.■ 3 Nanometer particle filtering capability keeps up high flow efficiency with minimum pressure drop.■ 5Ra electro-polished surface prevents internal contaminations.■ Baked with hot nitrogen after DI water cleaning to meet semiconductor process standards.■ Class 100 manufacturing, cleaning and packaging environment.■ 100% helium leak tested.Ordering Information

Size		Connection
4	1/4"	VM	MFS male type
6	3/8"	SW	Lok type
8	1/2"

Specifications

Removal Rating	≥ 0.0025 ㎛
Retention	Greater than 99.9999999% Removal of all particles down to 0.0025 ㎛
Rated flow @ 10⁹	100 SLPM (MAX 150SLPM)
	150 SLPM (MAX 200SLPM)
	600 SLPM (MAX 800SLPM)
Materials	Filter element	316L Stainless steel
Materials	Elctropolished housing	SM/DM 316L Stainless steel
Operationg conditions	Maximum inlet pressure	12 MPa (122kgf/cm²) at 20°C
	Maximum differential pressure	10 MPa (101kgf/cm²) at 20°C
	Maximum operating temperature	460 °C (Inert gas)
Helium leak rating	1 x 10^-9 atm · cc / sec
Surface finish interior	≤ Ra 5μin

Dimensions

PartNo.	A/mm	B/mm	C/mm	D/mm	E/mm	F/mm	H/mm
SS-H100-4VM	15.5	53	15.5	32	35	32	84
SS-H100-4SW	10.4	52.2	10.4	32	35	32	73
SS-H100-6(8)VM	19	53	19	32	35	32	91
SS-H100-6(8)SW	12	53	12	32	35	32	77
SS-H150-4VM	15.5	53	15.5	32	35	32	84
SS-H150-4SW	10.4	52.2	10.4	32	35	32	73
SS-H150-6(8)VM	19	53	19	32	35	32	91
SS-H150-6(8)SW	12	53	12	32	35	32	77
SS-H600-4VM	15.5	96	15.5	32	35	32	127
SS-H600-4SW	10.4	95.4	10.4	32	35	32	116
SS-H600-6(8)VM	19	96	19	32	35	32	134
SS-H600-6(8)SW	12	96	12	32	35	32	120

Performance Data

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